US 12,321,094 B2
Display control method, editing support method and information processing apparatus
Kunihiko Asada, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jan. 19, 2021, as Appl. No. 17/151,969.
Claims priority of application No. 2020-009446 (JP), filed on Jan. 23, 2020.
Prior Publication US 2021/0232044 A1, Jul. 29, 2021
Int. Cl. G03F 7/00 (2006.01); G06F 3/0482 (2013.01)
CPC G03F 7/0002 (2013.01) [G06F 3/0482 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A computer-implemented method of controlling a dispenser of an imprint apparatus to dispense an imprint material on a shot region of a substrate, the method comprising:
editing, in accordance with an input from a user, a drop pattern for an arrangement of a plurality of droplets of the imprint material to be dispensed by the dispenser onto the shot region of the substrate;
detecting, during the editing, positions of droplets within the drop pattern that do not conform to a rule that:
defines that a droplet of the imprint material must be arranged at a position inside a boundary line of the shot region and spaced apart from the boundary line by at least a predetermined distance;
displaying, on a display, during the editing, the positions that do not conform to the rule and positions that conform to the rule concurrently, together with shot region information indicating the shot region, with the positions that do not conform to the rule being made visibly distinguishable from the positions that conform to the rule in at least one of color, highlight, or flicker; and
dispensing the imprint material on the substrate based on the drop pattern in the positions that conform to the rule.