US 12,320,780 B2
Whispering gallery mode resonators for sensing applications
Lan Yang, Clayton, MO (US); Jiangang Zhu, University City, MO (US); Guangming Zhao, St. Louis, MO (US); Scott A. Miller, Ithaca, NY (US); Danhua Zhao, San Jose, CA (US); and Liren Zhu, Sunnyvale, CA (US)
Assigned to DEEPSIGHT TECHNOLOGY, INC., Santa Clara, CA (US)
Filed by DeepSight Technology, Inc., Los Altos, CA (US)
Filed on Jun. 3, 2022, as Appl. No. 17/832,507.
Application 17/832,507 is a continuation of application No. PCT/US2020/064094, filed on Dec. 9, 2020.
Claims priority of provisional application 62/945,538, filed on Dec. 9, 2019.
Prior Publication US 2022/0365036 A1, Nov. 17, 2022
Int. Cl. G01N 29/24 (2006.01); G01N 29/12 (2006.01); G02B 6/293 (2006.01)
CPC G01N 29/2418 (2013.01) [G01N 29/12 (2013.01); G01N 29/2406 (2013.01); G01N 29/2437 (2013.01); G02B 6/29341 (2013.01); G01N 2291/044 (2013.01); G01N 2291/106 (2013.01)] 32 Claims
OG exemplary drawing
 
1. An apparatus comprising:
at least one optical waveguide;
a plurality of whispering gallery mode (WGM) resonators, each WGM resonator configured to propagate a first set of whispering gallery modes (WGMs); and
a polymer structure encapsulating the at least one optical waveguide and at least one WGM resonator of the plurality of WGM resonators, the polymer structure comprising a first layer that reduces high-order modes in the at least one WGM resonator and a second layer comprising a material having an acoustic impedance matching an acoustic impedance of the at least one WGM resonator,
wherein the at least one WGM resonator is optically coupled to the at least one optical waveguide such that the at least one WGM resonator is configured to communicate to the at least one optical waveguide a first set of signals corresponding to the first set of WGMs.