US 12,320,751 B2
Methods of correcting aberration-induced imaging errors
Alexander Egner, Goettingen (DE); Claudia Geisler, Bad Gandersheim (DE); and Francesco Rocca, Goettingen (DE)
Assigned to INSTITUT FÜR NANOPHOTONIK GÖTTINGEN E.V., Göttingen (DE)
Appl. No. 17/624,920
Filed by Institut für Nanophotonik Goettingen e.V., Goettingen (DE)
PCT Filed Jul. 1, 2020, PCT No. PCT/EP2020/068501
§ 371(c)(1), (2) Date Jul. 25, 2022,
PCT Pub. No. WO2021/004850, PCT Pub. Date Jan. 14, 2021.
Claims priority of application No. 10 2019 118 446.0 (DE), filed on Jul. 8, 2019.
Prior Publication US 2022/0364994 A1, Nov. 17, 2022
Int. Cl. G01N 21/64 (2006.01); G02B 21/00 (2006.01)
CPC G01N 21/6458 (2013.01) [G01N 21/6402 (2013.01); G01N 21/6408 (2013.01); G01N 21/6428 (2013.01); G02B 21/0076 (2013.01); G01N 2021/6439 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A method of correcting aberration-induced imaging errors of an optical system including an objective and an adaptive optic in a beam path through the objective, the method comprising
selecting light and a sample such that the light, in acting upon the sample,
either reduces a measurement signal from the sample,
or leads a measurement signal from the sample towards a saturation value from below,
wherein a relative variation of the measurement signal depends on an intensity of the light,
registering the measurement signal from a focal area of the optical system in the sample over a first period of time to determine a first measurement value,
registering the measurement signal from the focal area of the optical system in the sample over a second period of time to determine a second measurement value,
focusing the light into the focal area in the sample by means of the optical system over a third period of time,
wherein
either the first period of time is at least partially earlier than the second period of time,
or the second period of time is at least partially later than the first period of time,
or the first period of time is at least partially earlier than the second period of time and the second period of time is at least partially later than the first period of time,
wherein the third period of time at least partially overlaps with at least one of the first period of time, the second period of time, and an intermediate period of time arranged in between the first period of time and the second period of time,
determining a measure value which is a strictly monotonically increasing or decreasing function of the relative variation of the measurement signal from the first measurement value and the second measurement value, and
controlling the adaptive optic using the measure value as a metric that is to be optimized by altering the controlling.