US 12,320,699 B2
Detector wavelength calibration
Javier Miguel Sánchez, Zurich (CH); Kotaro Ishizaki, Zurich (CH); Peter Roentgen, Thalwil (CH); and Francesco Paolo D'Aleo, Samstagern (CH)
Assigned to AMS SENSORS SINGAPORE PTE. LTD., Singapore (SG)
Appl. No. 17/785,744
Filed by ams Sensors Singapore Pte. Ltd., Singapore (SG)
PCT Filed Dec. 9, 2020, PCT No. PCT/SG2020/050729
§ 371(c)(1), (2) Date Jun. 15, 2022,
PCT Pub. No. WO2021/126077, PCT Pub. Date Jun. 24, 2021.
Claims priority of provisional application 62/950,195, filed on Dec. 19, 2019.
Prior Publication US 2023/0052878 A1, Feb. 16, 2023
Int. Cl. G01N 21/17 (2006.01); G01J 3/02 (2006.01); G01J 3/10 (2006.01); G01J 3/30 (2006.01); G01J 3/28 (2006.01); G01N 21/27 (2006.01)
CPC G01J 3/0297 (2013.01) [G01J 3/10 (2013.01); G01J 3/30 (2013.01); G01J 2003/2859 (2013.01); G01J 2003/2866 (2013.01); G01N 21/274 (2013.01)] 18 Claims
OG exemplary drawing
 
18. A device comprising:
a tunable light source that produces light ranging from ultraviolet wavelengths to infrared wavelengths;
an optical component which is operable by a driving parameter across an operating wavelength range;
a layer of material that is movably disposable in an optical path of the tunable light source and the optical component and that is substantially planar and substantially transparent and has a thickness of the order of wavelengths in said range, and having a known transmission profile with a plurality of transmission maximums and a plurality of transmission minimums over at least a portion of the operation wavelength range of the component, wherein
the optical component is varied by the driving parameter while detecting light transmitted through the layer of material in the optical path provided by the tunable light source that produces light of ultraviolet wavelengths, visible wavelengths, or infrared wavelengths to obtain driving parameter versus light intensity data and data that obtained by the optical component is compared with characterizing data previously derived for the layer of material in order to calibrate the driving parameter.