US 12,320,682 B2
High-Q whispering gallery mode (WGM) resonators encapsulated in polydimethylsilozane (PDMS) for highly sensitive displacement detection
Jie Liao, St. Louis, MO (US); Lan Yang, St. Louis, MO (US); Abraham Qavi, St. Louis, MO (US); and Maxwell Adolphson, St. Louis, MO (US)
Assigned to Washington University, St. Louis, MO (US)
Filed by Washington University, St. Louis, MO (US)
Filed on Jun. 24, 2024, as Appl. No. 18/752,301.
Claims priority of provisional application 63/509,855, filed on Jun. 23, 2023.
Prior Publication US 2024/0426641 A1, Dec. 26, 2024
Int. Cl. G01D 5/353 (2006.01)
CPC G01D 5/3537 (2013.01) 20 Claims
OG exemplary drawing
 
1. A displacement sensor, comprising:
an optical whispering gallery mode (WGM) microresonator; and
a package encasing at least a portion of the WGM microresonator, the package comprising polydimethylsiloxane (PDMS),
wherein the WGM microresonator is configured to capture information encoded in multimode spectra of the WGM microresonator for multiparameter sensing of perturbations and for generation of hyper-information barcodes, and wherein each mode of resonance of the WGM microresonator can sense different variables and/or pinpoint the location of perturbations.