| CPC F28F 13/10 (2013.01) | 20 Claims |

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1. A flow chamber, comprising:
an upper chamber including a top wall having a thickness;
an actuator located distally from the top wall and including a central region and a perimeter;
a lower chamber receiving a fluid from the upper chamber when the actuator is activated;
a support structure; and
wherein the top wall includes at least one cavity therein, the at least one cavity extending though a portion of the thickness of the top wall, and wherein the actuator is supported by the support structure at the central region, at least a portion of the perimeter being completely unpinned from the support structure, the actuator being configured to undergo vibrational motion when activated to drive the fluid from the upper chamber to the lower chamber.
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