US 12,320,595 B2
Top chamber cavities for center-pinned actuators
Vikram Mukundan, San Ramon, CA (US); Suryaprakash Ganti, Los Altos, CA (US); Ananth Saran Yalamarthy, Stanford, CA (US); Seshagiri Rao Madhavapeddy, La Jolla, CA (US); Prabhu Sathyamurthy, San Jose, CA (US); and Narayana Prasad Rayapati, Mountain View, CA (US)
Assigned to Frore Systems Inc., San Jose, CA (US)
Filed by Frore Systems Inc., San Jose, CA (US)
Filed on Sep. 20, 2023, as Appl. No. 18/370,732.
Application 18/370,732 is a continuation of application No. 17/367,057, filed on Jul. 2, 2021, granted, now 11,796,262.
Application 17/367,057 is a continuation in part of application No. 16/915,912, filed on Jun. 29, 2020, granted, now 11,464,140, issued on Oct. 4, 2022.
Claims priority of provisional application 62/945,001, filed on Dec. 6, 2019.
Prior Publication US 2024/0060733 A1, Feb. 22, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. F28F 13/10 (2006.01)
CPC F28F 13/10 (2013.01) 20 Claims
OG exemplary drawing
 
1. A flow chamber, comprising:
an upper chamber including a top wall having a thickness;
an actuator located distally from the top wall and including a central region and a perimeter;
a lower chamber receiving a fluid from the upper chamber when the actuator is activated;
a support structure; and
wherein the top wall includes at least one cavity therein, the at least one cavity extending though a portion of the thickness of the top wall, and wherein the actuator is supported by the support structure at the central region, at least a portion of the perimeter being completely unpinned from the support structure, the actuator being configured to undergo vibrational motion when activated to drive the fluid from the upper chamber to the lower chamber.