US 12,319,998 B2
Vacuum coating device
Sanbing Ren, Shanghai (CN); Junfei Fan, Shanghai (CN); Shanqing Li, Shanghai (CN); Chunwei Zhang, Shanghai (CN); and Xiaoli Jin, Shanghai (CN)
Assigned to Baoshan Iron & Steel Co., Ltd., Shanghai (CN)
Appl. No. 17/763,423
Filed by Baoshan Iron & Steel Co., Ltd., Shanghai (CN)
PCT Filed Sep. 25, 2020, PCT No. PCT/CN2020/117881
§ 371(c)(1), (2) Date Mar. 24, 2022,
PCT Pub. No. WO2021/057920, PCT Pub. Date Apr. 1, 2021.
Claims priority of application No. 201910915430.9 (CN), filed on Sep. 26, 2019.
Prior Publication US 2022/0341026 A1, Oct. 27, 2022
Int. Cl. C23C 14/24 (2006.01); C23C 14/22 (2006.01); C23C 14/56 (2006.01)
CPC C23C 14/243 (2013.01) [C23C 14/228 (2013.01); C23C 14/56 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A vacuum coating device, comprising:
a crucible;
an induction heater provided on a periphery of the crucible;
a flow distribution box connected to a top of the crucible via a steam pipe, wherein the flow distribution box is provided inside with a horizontal pressure stabilizing plate, a top of the flow distribution box is connected with a nozzle, the steam pipe is provided with a pressure regulating valve;
the pressure stabilizing plate has a multi-hole structure, a lower surface of the pressure stabilizing plate is connected to a horizontal flow suppression plate, and a space is formed between a side of the flow suppression plate and an inner wall of the flow distribution box;
a jet moderating zone is formed between a joint where the flow distribution box and the steam pipe are connected and the lower surface of the pressure stabilizing plate, and a jet accelerating zone is formed between an upper surface of the pressure stabilizing plate and a joint where the flow distribution box and the nozzle are connected,
wherein the pressure stabilizing plate has a T-shaped section, wherein ends along a horizontal direction of the pressure stabilizing plate are connected to the inner wall of the flow distribution box, and an end along a vertical direction of the pressure stabilizing plate is connected to the flow suppression plate, and
wherein the flow suppression plate is rectangular, a distance (D) of the space between the side of the flow suppression plate and the inner walls of the flow distribution box is 0.1˜5 mm.