US 12,319,995 B2
Vapor deposition apparatus, vapor deposition method, and method for manufacturing organic EL display apparatus
Koshi Nishida, Osaka (JP); Kozo Yano, Osaka (JP); Katsuhiko Kishimoto, Osaka (JP); and Susumu Sakio, Osaka (JP)
Assigned to HON HAI PRECISION INDUSTRY CO., LTD., New Taipei (TW)
Filed by HON HAI PRECISION INDUSTRY CO., LTD., New Taipei (TW)
Filed on Mar. 31, 2022, as Appl. No. 17/709,864.
Application 17/709,864 is a division of application No. 16/087,094, granted, now 11,319,624, previously published as PCT/JP2016/071623, filed on Jul. 22, 2016.
Claims priority of application No. 2016-058695 (JP), filed on Mar. 23, 2016.
Prior Publication US 2022/0220600 A1, Jul. 14, 2022
Int. Cl. C23C 14/04 (2006.01); C23C 14/12 (2006.01); H01L 51/00 (2006.01); H10K 71/16 (2023.01)
CPC C23C 14/042 (2013.01) [C23C 14/12 (2013.01); H10K 71/166 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A vapor deposition apparatus comprising:
a mask holder;
a deposition mask mounted on the mask holder, the deposition mask comprising a plurality of active regions in each of which a pattern of opening portions is to be formed;
a substrate holder configured to hold a substrate for vapor deposition, the substrate for vapor deposition being on a side of the deposition mask;
a touch plate provided on a side of the substrate for vapor deposition away from the deposition mask, the touch plate being in contact with a periphery of the substrate for vapor deposition;
a vapor deposition source configured to evaporate or sublimate a vapor deposition material, the vapor deposition source being provided on a side of the deposition mask away from the substrate for vapor deposition; and
a pressing device configured to press an upper surface of the substrate for vapor deposition;
wherein the vapor deposition apparatus further comprises a pressing tool between the touch plate and the substrate for vapor deposition; the pressing tool is configured to being pressed against the substrate for vapor deposition;
the pressing tool is a sphere.