US 12,319,705 B2
Ruthenium precursor composition, preparation method therefor, and formation method for ruthenium-containing film using same
Yun Tae Kim, Pyeongtaek-si (KR); Won Seok Han, Pyeongtaek-si (KR); Yoon A Park, Pyeongtaek-si (KR); and Wonyong Koh, Pyeongtaek-si (KR)
Assigned to UP CHEMICAL CO., LTD., Pyeongtaek-si (KR)
Appl. No. 18/854,563
Filed by UP CHEMICAL CO., LTD., Pyeongtaek-si (KR)
PCT Filed Mar. 30, 2023, PCT No. PCT/KR2023/004278
§ 371(c)(1), (2) Date Oct. 7, 2024,
PCT Pub. No. WO2023/200154, PCT Pub. Date Oct. 19, 2023.
Claims priority of application No. 10-2022-0045414 (KR), filed on Apr. 12, 2022.
Prior Publication US 2025/0129111 A1, Apr. 24, 2025
Int. Cl. C23C 16/18 (2006.01); C07F 15/00 (2006.01); C23C 16/455 (2006.01)
CPC C07F 15/0046 (2013.01) [C23C 16/45553 (2013.01)] 22 Claims
 
1. A ruthenium precursor composition, which comprises 20% to 60% by weight of a compound represented by the following Formula 1, 20% to 50% by weight of a compound represented by the following Formula 2, and 0% to 55% by weight of a compound represented by the following Formula 3, based on the total weight of the ruthenium precursor composition:

OG Complex Work Unit Chemistry