US 12,319,579 B2
Formation and/or growth of carbon-based nanostructures on copper-containing substrates, and related systems and methods
Brian L. Wardle, Lexington, MA (US); and Luiz Acauan, Somerville, MA (US)
Assigned to Massachusetts Institute of Technology, Cambridge, MA (US)
Appl. No. 17/413,175
Filed by Massachusetts Institute of Technology, Cambridge, MA (US)
PCT Filed Dec. 13, 2019, PCT No. PCT/US2019/066352
§ 371(c)(1), (2) Date Jun. 11, 2021,
PCT Pub. No. WO2020/124018, PCT Pub. Date Jun. 18, 2020.
Claims priority of provisional application 62/780,125, filed on Dec. 14, 2018.
Prior Publication US 2022/0041450 A1, Feb. 10, 2022
Int. Cl. C01B 32/16 (2017.01); C23C 16/02 (2006.01); C23C 16/26 (2006.01)
CPC C01B 32/16 (2017.08) [C23C 16/0245 (2013.01); C23C 16/0254 (2013.01); C23C 16/26 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
exposing a substrate comprising a metal and/or metal alloy region comprising copper to at least one agent such that the at least one agent chemically and/or physically modifies the substrate; and
exposing the substrate to conditions causing the formation and/or growth of cylindrical and/or pseudo-cylindrical elongated carbon-based nanostructures directly on metallic copper of the substrate;
wherein the exposing the substrate to the at least one agent comprises removing metal from the metal and/or metal alloy region to alter a surface roughness of the metal and/or metal alloy region.