US 12,318,946 B2
Substrate transfer robot and method of controlling the same
Masaya Yoshida, Himeji (JP); and Junichi Sugahara, Akashi (JP)
Assigned to KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe (JP)
Filed by KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe (JP)
Filed on Jun. 12, 2024, as Appl. No. 18/741,045.
Application 18/741,045 is a continuation of application No. 17/258,368, granted, now 12,036,680, previously published as PCT/JP2019/026783, filed on Jul. 5, 2019.
Claims priority of application No. 2018-129223 (JP), filed on Jul. 6, 2018.
Prior Publication US 2024/0359330 A1, Oct. 31, 2024
Int. Cl. B25J 9/16 (2006.01); B25J 9/00 (2006.01); B25J 11/00 (2006.01); B25J 15/00 (2006.01)
CPC B25J 9/1682 (2013.01) [B25J 9/0087 (2013.01); B25J 9/1651 (2013.01); B25J 9/1664 (2013.01); B25J 11/0095 (2013.01); B25J 15/0014 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A substrate transfer robot comprising:
a robot body including a first hand and a second hand, the first hand having a first substrate placing part on which a first substrate is placed and the second hand having a second substrate placing part on which a second substrate is placed, and the first hand and the second hand being capable of advancing and retreating; and
a robot controller configured to control operations of the first hand and the second hand,
wherein the robot controller performs a substrate exchange operation in which the first hand is operated so that the first hand is advanced while the first substrate is not placed on the first substrate placing part to place the first substrate placed on a substrate placement body on the first substrate placing part, and the first hand is then retreated, and the second hand is operated so that the second hand is advanced while the second substrate is placed on the second substrate placing part to place the second substrate placed on the second substrate placing part of the second hand on the substrate placement body, and the second hand is then retreated, wherein
a first part of the retreating operation of the first hand and a first part of the advancing operation of the second hand are performed simultaneously,
a second part of the retreating operation of the first hand and a first part of the retreating operation of the second hand are performed simultaneously, and
a speed of the first hand is controlled such that an absolute value of a maximum speed of the first hand in a period in which the first part of the retreating operation of the first hand and the first part of the advancing operation of the second hand are being performed simultaneously is lower than an absolute value of a maximum speed of the first hand in a period in which the second part of the retreating operation of the first hand and first part of the retreating operation of the second hand are being performed simultaneously.