US 11,997,913 B2
Deposition mask, method of fabricating the same, and method of manufacturing display device using the same
Min Ho Moon, Seongnam-si (KR); Jin Oh Kwag, Yongin-si (KR); Seung Yong Song, Suwon-si (KR); Duck Jung Lee, Hwaseong-si (KR); Seul Lee, Hwaseong-si (KR); and Sung Soon Im, Suwon-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Jun. 16, 2023, as Appl. No. 18/210,653.
Application 18/210,653 is a division of application No. 16/914,446, filed on Jun. 28, 2020, granted, now 11,723,260.
Claims priority of application No. 10-2019-0113341 (KR), filed on Sep. 16, 2019.
Prior Publication US 2024/0040921 A1, Feb. 1, 2024
Int. Cl. H01L 51/56 (2006.01); C23C 14/04 (2006.01); H10K 71/00 (2023.01); H10K 71/16 (2023.01)
CPC H10K 71/166 (2023.02) [C23C 14/042 (2013.01); H10K 71/00 (2023.02)] 3 Claims
OG exemplary drawing
 
1. A method of manufacturing a deposition mask for making a display device comprising the steps of:
providing an open sheet having a first portion surrounding at least one opening, a second portion disposed in the at least one opening, and a third portion connecting the first portion and the second portion;
disposing a metal sheet having a metal mesh portion on the open sheet; and
welding the metal mesh portion and the second portion and removing the third portion from the open sheet.