US 11,997,375 B2
Image correction method, imaging device, and inspection device
Yuki Inaura, Chiryu (JP); Shuichiro Kito, Toyota (JP); and Yuta Yokoi, Kariya (JP)
Assigned to FUJI CORPORATION, Chiryu (JP)
Appl. No. 17/904,815
Filed by FUJI CORPORATION, Chiryu (JP)
PCT Filed Feb. 27, 2020, PCT No. PCT/JP2020/008044
§ 371(c)(1), (2) Date Aug. 23, 2022,
PCT Pub. No. WO2021/171487, PCT Pub. Date Sep. 2, 2021.
Prior Publication US 2023/0116070 A1, Apr. 13, 2023
Int. Cl. H04N 23/56 (2023.01); H04N 23/10 (2023.01); H04N 23/88 (2023.01); H04N 25/611 (2023.01)
CPC H04N 23/56 (2023.01) [H04N 23/10 (2023.01); H04N 23/88 (2023.01); H04N 25/611 (2023.01)] 4 Claims
OG exemplary drawing
 
1. An image correction method for correcting multiple original images captured under illumination by multiple different light source colors in generating a composite image by superposing the original images, the image correction method comprising:
(a) a step of obtaining a correction amount for correcting a position of a fiducial mark recognized from a reference image of a specific light source color in reference images of the multiple different light source colors resulting from imaging a member on which the fiducial mark is provided under illumination by the multiple different light source colors to a reference position of the fiducial mark in the reference image of the specific light source color and setting the correction amount by associating the correction amount with the specific light source color;
(b) obtaining correction amounts for correcting positions of the fiducial mark recognized from the reference images of other light source colors than the specific light source color to the reference position in the reference image of the specific light source color for the other light source colors and setting the correction amounts by associating the correction amounts with the other light source colors; and
(c) when the original images are captured, correcting collectively distortion aberration and chromatic aberration of the original images of the multiple different light source colors using the correction amounts associated with the multiple different light source colors.