US 11,996,821 B2
Elastic wave device with sub-wavelength thick piezoelectric layer and high velocity layer
Rei Goto, Osaka (JP); Jie Zou, Irvine, CA (US); Hiroyuki Nakamura, Osaka (JP); and Chun Sing Lam, Osaka (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Aug. 3, 2020, as Appl. No. 16/983,472.
Application 16/983,472 is a continuation of application No. 15/787,596, filed on Oct. 18, 2017, granted, now 10,778,181.
Claims priority of provisional application 62/423,705, filed on Nov. 17, 2016.
Claims priority of provisional application 62/410,804, filed on Oct. 20, 2016.
Prior Publication US 2021/0050840 A1, Feb. 18, 2021
Int. Cl. H03H 9/02 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01); H03H 9/72 (2006.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01)
CPC H03H 9/02559 (2013.01) [H03H 9/02574 (2013.01); H03H 9/02818 (2013.01); H03H 9/02834 (2013.01); H03H 9/25 (2013.01); H03H 9/6483 (2013.01); H03H 9/6489 (2013.01); H03H 9/725 (2013.01); H10N 30/8542 (2023.02); H10N 30/87 (2023.02); H10N 30/877 (2023.02)] 20 Claims
OG exemplary drawing
 
1. An elastic wave device comprising:
a piezoelectric layer having a cut angle in a cut angle range from −10° to 30°;
an interdigital transducer electrode on the piezoelectric layer; and
a high velocity layer in physical contact with the piezoelectric layer, the high velocity layer having a higher bulk velocity than a velocity of an elastic wave, the elastic wave device configured to generate the elastic wave with a wavelength of λ, and the piezoelectric layer having a thickness in a thickness range from 0.35λ to 0.8λ.