US 11,996,820 B2
Fifth-generation (5G)-focused piezoelectric resonators and filters
Yansong Yang, Urbana, IL (US); Ruochen Lu, Champaign, IL (US); Liuqing Gao, Champaign, IL (US); and Songbin Gong, Champaign, IL (US)
Assigned to The Board of Trustees of the University of Illinois, Urbana, IL (US)
Filed by Board of Trustees of the University of Illinois, Urbana, IL (US)
Filed on Jan. 22, 2021, as Appl. No. 17/248,402.
Claims priority of provisional application 62/965,365, filed on Jan. 24, 2020.
Prior Publication US 2021/0234528 A1, Jul. 29, 2021
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/54 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/132 (2013.01); H03H 9/173 (2013.01); H03H 9/176 (2013.01); H03H 9/542 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/021 (2013.01)] 24 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a piezoelectric thin film suspended above a carrier substrate, wherein the piezoelectric thin film is adapted to propagate an acoustic wave in a Lamb mode excited by a component of an electric field that is oriented in a longitudinal direction along a length of the piezoelectric thin film;
a first signal electrode disposed on the piezoelectric thin film and oriented in a transverse direction perpendicular to the longitudinal direction, the first signal electrode having a proximal end and a distal end;
a first ground electrode disposed on the piezoelectric thin film and oriented in the transverse direction, the first ground electrode having a proximal end and a distal end;
wherein the piezoelectric thin film comprises:
a first release window located at a first end of the piezoelectric thin film;
a second release window located at a second end of the piezoelectric thin film;
a first intermittent release window located beyond and adjacent to the distal end of the first signal electrode, wherein the first intermittent release window is also adjacent to the proximal end of the first ground electrode; and
a second intermittent release window located beyond and adjacent to the distal end of the first ground electrode, wherein the second intermittent release window is also adjacent to the proximal end of the first signal electrode.