US 11,996,419 B2
Light detector, light detection system, lidar device, mobile body, and vehicle
Kazuaki Okamoto, Yokohama Kanagawa (JP); Honam Kwon, Kawasaki Kanagawa (JP); Mariko Shimizu, Setagaya Tokyo (JP); Kazuhiro Suzuki, Meguro Tokyo (JP); Keita Sasaki, Yokohama Kanagawa (JP); and Ikuo Fujiwara, Yokohama Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 20, 2021, as Appl. No. 17/445,590.
Claims priority of application No. 2021-002071 (JP), filed on Jan. 8, 2021.
Prior Publication US 2022/0223631 A1, Jul. 14, 2022
Int. Cl. H01L 27/144 (2006.01); G01S 7/481 (2006.01); G01S 17/10 (2020.01); H01L 31/0232 (2014.01); H01L 31/0352 (2006.01); H01L 31/107 (2006.01)
CPC H01L 27/1446 (2013.01) [G01S 7/4816 (2013.01); G01S 17/10 (2013.01); H01L 31/02327 (2013.01); H01L 31/03529 (2013.01); H01L 31/107 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A light detector, comprising:
a plurality of elements, each of the elements including a first semiconductor region of a first conductivity type, a second semiconductor region of the first conductivity type, and a third semiconductor region of a second conductivity type, the second semiconductor region being located on the first semiconductor region and having a higher first-conductivity-type impurity concentration than the first semiconductor region, the third semiconductor region being located on the second semiconductor region, the elements being arranged at a first period in a second direction crossing a first direction, the first direction being from the first semiconductor region toward the second semiconductor region;
a quenching part electrically connected with the third semiconductor region;
a plurality of lenses located respectively on the elements, one of the lenses being positioned on one of the elements; and
a refracting layer located between the elements and the lenses, the refracting layer having a first thickness,
a ratio of the first thickness to the first period being not less than 0.16 and not more than 0.72.