US 11,996,311 B2
Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium
Hiroshi Ashihara, Tokyo (JP); and Yuji Takebayashi, Toyama (JP)
Assigned to Kokusai Electric Corporation, Tokyo (JP)
Filed by Kokusai Electric Corporation, Tokyo (JP)
Filed on Sep. 29, 2022, as Appl. No. 17/955,758.
Claims priority of application No. 2022-044565 (JP), filed on Mar. 18, 2022.
Prior Publication US 2023/0298918 A1, Sep. 21, 2023
Int. Cl. H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67712 (2013.01) [H01L 21/67173 (2013.01); H01L 21/67201 (2013.01); H01L 21/67736 (2013.01); H01L 21/67745 (2013.01); H01L 21/68764 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
at least one process chamber in which at least one substrate is processed;
a mounting stage configured to be capable of mounting the at least one substrate on the mounting stage;
a transport chamber including a transfer area configured to be capable of transferring the at least one substrate to the mounting stage and a conveyor configured to be capable of holding the mounting stage at at least two places in a vertical direction and transporting the mounting stage;
a load port configured to be capable of mounting an accommodating container capable of accommodating the at least one substrate;
a transfer unit configured to be capable of transferring the at least one substrate between the accommodating container mounted on the load port and the transport chamber; and
a controller configured to be capable of performing transport control of the conveyor in the transport chamber, wherein the performing the transport control includes:
checking a holding state of the mounting stage by the conveyor when the at least one substrate is transferred;
controlling the conveyor to move to the transfer area when the mounting stage is being held; and
acquiring and holding the mounting stage from the at least one process chamber and then controlling the conveyor to move to the transfer area when the mounting stage is not being held.