US 11,996,269 B2
Extremum seeking control apparatuses with online parameter adjustment and methods
Aaron Burry, Ontario, NY (US); and Vladimir Kozitsky, Rochester, NY (US)
Assigned to MKS Instruments, Inc., Andover, MA (US)
Filed by MKS Instruments, Inc., Andover, MA (US)
Filed on Sep. 8, 2022, as Appl. No. 17/940,047.
Prior Publication US 2024/0087850 A1, Mar. 14, 2024
Int. Cl. H01J 37/32 (2006.01); H03K 5/00 (2006.01)
CPC H01J 37/32183 (2013.01) [H03K 5/00006 (2013.01); H01J 2237/327 (2013.01)] 60 Claims
OG exemplary drawing
 
1. A power supply system for powering a load, the power supply system comprising:
a radio frequency (RF) power source configured to generate an output signal at an output frequency;
a signal source configured to generate a perturbation signal;
an extremum seeking frequency controller configured to generate a frequency control signal based on the perturbation signal, the frequency control signal varying the output frequency of the RF power source; and
a frequency selector configured to select a perturbation frequency of the perturbation signal that is isolated from at least one frequency tone associated with the power supply system.