US 11,994,714 B2
Photonic integrated circuit structure with at least one tapered sidewall liner adjacent to a waveguide core
Brett T. Cucci, Colchester, VT (US); Yusheng Bian, Ballston Lake, NY (US); Abdelsalam Aboketaf, Essex Junction, VT (US); and Edward W. Kiewra, South Burlington, VT (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GLOBALFOUNDRIES U.S. Inc., Malta, NY (US)
Filed on Sep. 30, 2021, as Appl. No. 17/490,059.
Prior Publication US 2023/0101580 A1, Mar. 30, 2023
Int. Cl. G02B 6/122 (2006.01); G02B 6/12 (2006.01); G02B 6/125 (2006.01); G02B 6/132 (2006.01)
CPC G02B 6/1228 (2013.01) [G02B 6/1223 (2013.01); G02B 6/125 (2013.01); G02B 6/132 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12147 (2013.01); G02B 6/1225 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A structure comprising:
a waveguide core on a top surface of a cladding material layer and having opposing sidewalls; and
at least one tapered sidewall liner on the top surface of the cladding material layer and positioned laterally adjacent to at least one of the opposing sidewalls of the waveguide core,
wherein each tapered sidewall liner has a different refractive index than the waveguide core,
wherein each tapered sidewall liner has a bottom end, a top end opposite the bottom end, a first side immediately adjacent to a sidewall of the waveguide core and extending between the bottom end and the top end, and a second side opposite the first side and extending between the bottom end and the top end,
wherein the second side is separated from the first side at the bottom end and in contact with the first side at the top end, and
wherein each tapered sidewall liner and the waveguide core have equal heights.