US 11,994,713 B2
Directionally tunable optical reflector
Yu-Hao Chen, HsinChu (TW); Hui Yu Lee, Hsin-Chu (TW); Jui-Feng Kuan, Hsinchu County (TW); and Chien-Te Wu, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu (TW)
Filed on Mar. 20, 2023, as Appl. No. 18/186,387.
Application 18/186,387 is a continuation of application No. 17/466,550, filed on Sep. 3, 2021, granted, now 11,609,374.
Claims priority of provisional application 63/164,044, filed on Mar. 22, 2021.
Prior Publication US 2023/0228939 A1, Jul. 20, 2023
Int. Cl. G02B 6/12 (2006.01)
CPC G02B 6/12016 (2013.01) [G02B 2006/12104 (2013.01); G02B 2006/12138 (2013.01); G02B 2006/12145 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
an input waveguide configured to receive an incident light;
a plurality of output waveguides;
a reflective structure that includes a plurality of conductive pads, wherein in response to different voltages applied to the conductive pads, the reflective structure is configured to reflect the incident light into different ones of the output waveguides; and
an oxide material, wherein the input waveguide, the output waveguides, and the reflective structure are disposed over the oxide material.