US 11,994,566 B2
Magnetic sensor and its manufacturing method
Kenzo Makino, Tokyo (JP); and Takafumi Kobayashi, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Dec. 30, 2022, as Appl. No. 18/091,475.
Application 18/091,475 is a continuation of application No. 17/131,142, filed on Dec. 22, 2020, granted, now 11,573,276.
Claims priority of application No. 2020-057483 (JP), filed on Mar. 27, 2020.
Prior Publication US 2023/0135336 A1, May 4, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 33/09 (2006.01); H10N 50/85 (2023.01); H10N 50/01 (2023.01)
CPC G01R 33/09 (2013.01) [H10N 50/85 (2023.02); H10N 50/01 (2023.02)] 7 Claims
OG exemplary drawing
 
1. A magnetic sensor comprising:
a magnetoresistive element whose resistance changes with an external magnetic field; and
a support member that supports the magnetoresistive element, wherein
the support member includes a top surface opposed to the magnetoresistive element and a bottom surface located on a side opposite to the top surface,
the top surface of the support member includes an inclined portion inclined relative to the bottom surface,
the magnetoresistive element includes a main body, and a lower electrode and an upper electrode that supply a current to the main body,
the main body is located on the inclined portion,
the lower electrode is interposed between the main body and the inclined portion,
the upper electrode is located on the main body,
the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface,
the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion, and
a distance from the upper end of the inclined portion to the first end of the lower electrode is greater than a distance from the upper end of the inclined portion to the lower end of the inclined portion.