CPC G01N 25/18 (2013.01) [G01N 27/18 (2013.01)] | 4 Claims |
1. A concentration measurement device comprising:
a sensor configured to measure a concentration of a measurement target gas in a mixture of gases on the basis of thermal conductivity of the measurement target gas, the mixture of gases including two or more components; and
a heating unit configured to heat the mixture of gases so that the concentration of the measurement target gas can be uniquely determined with respect to the thermal conductivity,
wherein:
the sensor includes a pair of thermoelectromotive devices in which electromotive force according to temperature is generated and a heating unit that is placed between the pair of thermoelectromotive devices and that generates heat according to an applied voltage, and measures a flow rate of the mixture of gases according to the electromotive force generated in the pair of thermoelectromotive devices heated by the heating unit,
the concentration measurement device further includes a controller configured to control a voltage applied to the heating unit, and
the controller applies, to the heating unit, a second voltage higher than a first voltage that is applied when measuring a flow rate of the mixture of gases, and causes the sensor to measure a concentration of the measurement target gas.
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