US 11,994,454 B2
Particle beam experiment data analysis device
Akinori Asahara, Tokyo (JP); Hidekazu Morita, Tokyo (JP); Takuya Kanazawa, Tokyo (JP); Kanta Ono, Tsukuba (JP); Masao Yano, Toyota (JP); and Tetsuya Shoji, Toyota (JP)
Assigned to HITACHI, LTD., Tokyo (JP); and TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota (JP)
Appl. No. 17/605,065
Filed by Hitachi, Ltd., Tokyo (JP); and TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota (JP)
PCT Filed Apr. 24, 2020, PCT No. PCT/JP2020/017587
§ 371(c)(1), (2) Date Oct. 20, 2021,
PCT Pub. No. WO2020/218462, PCT Pub. Date Oct. 29, 2020.
Claims priority of application No. 2019-085277 (JP), filed on Apr. 26, 2019.
Prior Publication US 2022/0187180 A1, Jun. 16, 2022
Int. Cl. G01N 15/0205 (2024.01); G01N 23/201 (2018.01)
CPC G01N 15/0211 (2013.01) [G01N 23/201 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A particle beam measurement results analysis device to calculate a spatial parameter distribution representing spatial structure of a sample based on a scattering pattern corresponding to projection of the spatial structure of the sample to wavenumber space, the projection being obtained by detecting scattering of a particle beam which enters the sample and intersects with the sample, the device comprising:
an interaction estimation section to provide estimates for signals on the scattering pattern in association with at which point on a spatial parameter distribution of the sample interactions occur during scattering;
a parameter distribution calculation section to aggregate estimation results of the interaction estimation section to calculate a spatial parameter distribution of a sample matching an aggregated result; and
a spatial parameter accuracy improvement calculation section to perform alternately and repeatedly estimation in the interaction estimation section and calculation in the parameter distribution calculation section in order to improve estimation accuracy in spatial parameter distributions.