US 11,994,441 B2
Sensor device for environmental perception and/or for reliably gripping and manipulating objects
Stephan Johann Mühlbacher-Karrer, Klagenfurt (AT); Hubert Zangl, Graz (AT); Herbert Gold, Graz (AT); Georg Jakopic, Graz (AT); and Andreas Tschepp, Kumberg (AT)
Assigned to Joanneum Research Forschungsgesellschaft mbH, Graz (AT); and Alpen-Adria-Universität Klagenfurt, Klagenfurt am Wörthersee (AT)
Appl. No. 17/289,532
Filed by JOANNEUM RESEARCH Forschungsgesellschaft mbH, Graz (AT); and Alpen-Adria-Universität Klagenfurt, Klagenfurt am Wörthersee (AT)
PCT Filed Oct. 29, 2019, PCT No. PCT/EP2019/079500
§ 371(c)(1), (2) Date Apr. 28, 2021,
PCT Pub. No. WO2020/089211, PCT Pub. Date May 7, 2020.
Claims priority of application No. A 50929/2018 (AT), filed on Oct. 29, 2018.
Prior Publication US 2021/0396612 A1, Dec. 23, 2021
Int. Cl. G01L 5/00 (2006.01); G01D 5/24 (2006.01); G01L 1/16 (2006.01); H01L 25/16 (2023.01); H10N 30/30 (2023.01); H10N 30/857 (2023.01); H10N 30/87 (2023.01); H10N 39/00 (2023.01)
CPC G01L 5/009 (2013.01) [G01D 5/24 (2013.01); G01L 1/16 (2013.01); H01L 25/16 (2013.01); H10N 39/00 (2023.02); H10N 30/302 (2023.02); H10N 30/857 (2023.02); H10N 30/878 (2023.02)] 16 Claims
OG exemplary drawing
 
1. Sensor device (1), comprising:
a first substrate (3);
a capacitive sensor (4) for detecting an approach of an object, wherein at least a portion of the capacitive sensor (4) is arranged on a first side of the first substrate (3);
a piezoelectric sensor (5) for detecting a pressure or a pressure change, wherein the piezoelectric sensor (5) is arranged in the sensor device (1) spaced from a second side of the first substrate (3), the second side of the first substrate (3) being opposite to the first side thereof; and
a shield electrode (7) between the capacitive sensor (4) and the piezoelectric sensor (5), wherein the shield electrode (7) is electrically coupled to ground.