CPC G01L 5/009 (2013.01) [G01D 5/24 (2013.01); G01L 1/16 (2013.01); H01L 25/16 (2013.01); H10N 39/00 (2023.02); H10N 30/302 (2023.02); H10N 30/857 (2023.02); H10N 30/878 (2023.02)] | 16 Claims |
1. Sensor device (1), comprising:
a first substrate (3);
a capacitive sensor (4) for detecting an approach of an object, wherein at least a portion of the capacitive sensor (4) is arranged on a first side of the first substrate (3);
a piezoelectric sensor (5) for detecting a pressure or a pressure change, wherein the piezoelectric sensor (5) is arranged in the sensor device (1) spaced from a second side of the first substrate (3), the second side of the first substrate (3) being opposite to the first side thereof; and
a shield electrode (7) between the capacitive sensor (4) and the piezoelectric sensor (5), wherein the shield electrode (7) is electrically coupled to ground.
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