US 11,994,390 B2
Vibratory sensor with electronic balancing
Markus Hans Gnerlich, Plymouth, MN (US)
Assigned to Honeywell International Inc., Charlotte, NC (US)
Filed by Honeywell International Inc., Charlotte, NC (US)
Filed on Feb. 9, 2022, as Appl. No. 17/668,031.
Prior Publication US 2023/0251091 A1, Aug. 10, 2023
Int. Cl. G01C 19/5712 (2012.01); G01C 19/5726 (2012.01); G01C 19/574 (2012.01)
CPC G01C 19/5712 (2013.01) [G01C 19/5726 (2013.01); G01C 19/574 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A vibratory sensor with electronic balancing, the vibratory sensor comprising:
a substrate:
at least one pair of proof masses, each pair of proof masses including a first proof mass and a second proof mass, the first proof mass and the second proof mass able to move in opposing directions;
at least one tunable spring having electro-thermodynamic characteristics for each first and second proof mass in the at least one pair of proof masses, each tunable spring coupling an associated one of the first and second proof masses to the substrate; and
a steering circuit configured to selectively couple current from a power source to each tunable spring to adjust a stiffness of at least one tunable spring based on the electro-thermodynamic characteristics of the at least one tunable spring to balance relative movement between the first and second proof masses of the at least one pair of proof masses.