US 11,994,234 B2
Gate valve and driving method
Norihiko Amikura, Miyagi (JP); and Masatomo Kita, Miyagi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Nov. 18, 2022, as Appl. No. 17/990,397.
Claims priority of application No. 2021-188737 (JP), filed on Nov. 19, 2021.
Prior Publication US 2023/0160494 A1, May 25, 2023
Int. Cl. F16K 51/02 (2006.01); F16K 31/42 (2006.01)
CPC F16K 31/423 (2013.01) [F16K 51/02 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A gate valve that opens and closes a first opening of a first chamber in a vacuum processing apparatus, the gate valve comprising:
a valve element configured to open and close the first opening;
a drive configured to move the valve element so that the valve element takes at least a closing position, where the valve element closes the first opening, and an opening position, where the valve element opens the first opening;
a first gas line and a second gas line; and
a first switching valve that connects one of the first gas line and the second gas line to the drive,
wherein the drive is configured to:
move the valve element from the opening position to the closing position by pressure of gas supplied from the first gas line or the second gas line; and
hold the valve element at the closing position by pressure of gas supplied from the second gas line, and
wherein the first switching valve has a normally closed valve that changes a connection as to whether or not to supply gas from the first gas line to the drive, and a normally open valve that changes a connection as to whether or not to supply gas from the second gas line to the drive.