US 11,993,843 B2
Substrate processing apparatus
Seung Wook Kim, Gyeongsangnam-do (KR); JuIll Lee, Chungcheongnam-do (KR); Won Ki Jeong, Chungcheongnam-do (KR); Dong Rak Jung, Chungcheongnam-do (KR); and Hong Hyun Kim, Gyeonggi-do (KR)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Jul. 19, 2018, as Appl. No. 16/039,817.
Claims priority of application No. 10-2017-0111040 (KR), filed on Aug. 31, 2017.
Prior Publication US 2019/0062907 A1, Feb. 28, 2019
Int. Cl. C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01)
CPC C23C 16/4411 (2013.01) [C23C 16/45565 (2013.01); C23C 16/45572 (2013.01); H01J 37/32522 (2013.01); C23C 16/45551 (2013.01); C23C 16/4586 (2013.01); H01J 37/32082 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A cooling device comprising:
a first partition;
a second partition surrounding the first partition;
a third partition surrounding the second partition; and
an elongated separator extending from the first partition to the third partition by penetrating through the second partition, and separating a space between the second partition and the third partition into a first area and a second area, and separating a space between the second partition and the first partition into a third area and a fourth area,
wherein the elongated separator comprises a body having a first surface and a second surface that are opposite surfaces facing each other in a height direction of the elongated separator, a first channel located on the first surface, a second channel located on the second surface in a lower portion of the elongated separator, a first member located in the upper portion of the elongated separator and between the second partition and the third partition, a second member located in the upper portion of the elongated separator and between the first partition and the second partition, a third member located in the lower portion of the elongated separator and between the second partition and the third partition, and a fourth member located in the lower portion of the elongated separator and between the first partition and the second partition;
wherein at least a portion of the first member is coupled to at least a portion of the third member via the body in the height direction and at least a portion of the second member is coupled to at least a portion of the fourth member via the body in the height direction,
wherein the first channel is formed by the first member and the second member,
wherein the second channel is formed by the third member and the fourth,
wherein the first channel connects the first area and the third area on the upper portion of the elongated separator,
wherein the second channel connects the second area and the fourth area on the lower portion of the elongated separator, and
wherein the first channel and the second channel are in a skew position with respect to each other.