CPC C08J 3/20 (2013.01) [C08J 2379/08 (2013.01)] | 3 Claims |
1. A surface treatment method of a polymer for 5G, comprising the steps of:
S1. proceed oxygen insertion by using a Penning ion source on the surface of the polymer, controlling a roughness of the polymer surface to change greater than 0 μm and less than or equal to 0.1 μm, obtaining a first polymer;
S2. proceed oxygen addition by using a Kaufman ion source on a surface of the first polymer, controlling a roughness of the first polymer surface to change greater than 0 μm and less than or equal to 0.1 μm, obtaining a second polymer;
S3. repeat steps S1 and S2 until the surface resistance of the second polymer is less than or equal to 1015Ω;
S4. proceed hydrogen abstraction by using a Hall ion source on the surface of the second polymer, obtaining a third polymer;
S5. repeat steps S1-S4 until the surface roughness of the third polymer is 0.1˜0.4 μm; wherein the oxygen insertion in S1 has an oxygen flow ranging from 5 sccm to 80 sccm, a voltage ranging from 20 kV to 40 kV, and a beam intensity ranging from 1 mA to 50 mA, the oxygen addition in S2 has an oxygen flow ranging from 20 sccm to 100 sccm, a voltage ranging from 10 kV to 20 kV, and a beam intensity ranging from 5 mA to 150 mA, and the hydrogen abstraction has an argon flow ranging from 50 sccm to 150 sccm, a voltage ranging from 0.1 kV to 1 kV, and a beam intensity ranging from 200 mA to 1000 mA.
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