US 11,993,537 B2
Substrate loading cassette and method of processing substrate using the same
Hyo-Seop Kim, Asan-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Sep. 3, 2021, as Appl. No. 17/466,061.
Claims priority of application No. 10-2021-0009626 (KR), filed on Jan. 22, 2021.
Prior Publication US 2022/0234948 A1, Jul. 28, 2022
Int. Cl. C03C 21/00 (2006.01)
CPC C03C 21/002 (2013.01) 12 Claims
OG exemplary drawing
 
1. A substrate loading cassette comprising:
a first frame;
a second frame facing the first frame and spaced apart from the first frame in a first direction;
a first supporter coupled with the first frame; and
a second supporter movably coupled with the first frame and disposed under the first supporter, the first supporter comprising:
a first support bar coupled with the first frame and extending in a second direction perpendicular to the first direction; and
a plurality of first branch portions protruding from the first support bar toward the second frame, the second supporter comprising:
a second support bar coupled with the first frame and extending in the second direction; and
a plurality of second branch portions protruding from the second support bar toward the second frame, wherein the plurality of second branch portions are configured to move in a direction parallel to the second direction;
wherein none of the plurality of first branch portions overlap any of the plurality of second branch portions when viewed in a plan view from a third direction perpendicular to the first direction and the second direction.