CPC C03C 21/002 (2013.01) | 12 Claims |
1. A substrate loading cassette comprising:
a first frame;
a second frame facing the first frame and spaced apart from the first frame in a first direction;
a first supporter coupled with the first frame; and
a second supporter movably coupled with the first frame and disposed under the first supporter, the first supporter comprising:
a first support bar coupled with the first frame and extending in a second direction perpendicular to the first direction; and
a plurality of first branch portions protruding from the first support bar toward the second frame, the second supporter comprising:
a second support bar coupled with the first frame and extending in the second direction; and
a plurality of second branch portions protruding from the second support bar toward the second frame, wherein the plurality of second branch portions are configured to move in a direction parallel to the second direction;
wherein none of the plurality of first branch portions overlap any of the plurality of second branch portions when viewed in a plan view from a third direction perpendicular to the first direction and the second direction.
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