US 11,992,320 B2
Sensor and inspection device
Yoshihiro Higashi, Komatsu Ishikawa (JP); Akira Kikitsu, Yokohama Kanagawa (JP); Satoshi Shirotori, Yokohama Kanagawa (JP); and Yoshinari Kurosaki, Kawasaki Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 28, 2022, as Appl. No. 17/682,998.
Claims priority of application No. 2021-145587 (JP), filed on Sep. 7, 2021.
Prior Publication US 2023/0074881 A1, Mar. 9, 2023
Int. Cl. G01R 33/09 (2006.01); A61B 5/245 (2021.01)
CPC A61B 5/245 (2021.01) [G01R 33/093 (2013.01); A61B 2562/0223 (2013.01); A61B 2562/046 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a first magnetic member;
a first counter magnetic member, a direction from the first magnetic member to the first counter magnetic member being along a first direction, a first gap being provided between the first magnetic member and the first counter magnetic member;
a first magnetic element including a first magnetic region, a second direction from the first magnetic region to the first gap crossing the first direction; and
a first magnetic interconnect, a direction from the first magnetic interconnect to the first magnetic region being along the second direction,
wherein
the first magnetic interconnect includes a first surface and a second surface,
a position of the second surface in the second direction is between a position of the first surface in the second direction and a position of the first magnetic member in the second direction, and
at least a part of the first surface is non-parallel to at least a part of the second surface.