US 12,317,621 B2
Imaging device and electronic device
Tetsuya Yamaguchi, Kanagawa (JP)
Assigned to SONY SEMICONDUCTOR SOLUTIONS CORPORATION, Kanagawa (JP)
Filed by SONY SEMICONDUCTOR SOLUTIONS CORPORATION, Kanagawa (JP)
Filed on Oct. 25, 2022, as Appl. No. 17/972,781.
Application 17/972,781 is a continuation of application No. 17/756,175, previously published as PCT/JP2020/038146, filed on Oct. 8, 2020.
Prior Publication US 2023/0042668 A1, Feb. 9, 2023
Int. Cl. H10F 19/75 (2025.01); H10F 39/00 (2025.01)
CPC H10F 39/8053 (2025.01) [H10F 39/024 (2025.01); H10F 39/8063 (2025.01)] 12 Claims
OG exemplary drawing
 
1. A light detecting device, comprising:
a semiconductor substrate comprising:
a first surface configured to receive light; and
a second surface opposite to the first surface;
a lens on a side opposite to the first surface of the semiconductor substrate;
a first photoelectric conversion region in the semiconductor substrate;
a second photoelectric conversion region in the semiconductor substrate and adjacent to the first photoelectric conversion region;
a first color filter above the first photoelectric conversion region in a cross-sectional view;
a second color filter above the second photoelectric conversion region in the cross-sectional view; and
a separation region between the first color filter and the second color filter in the cross-sectional view, wherein
the separation region includes a first film, a second film, and a first metal film,
the first film is between the first color filter and the second film in the cross-sectional view,
the second film is between the first film and the first metal film in the cross-sectional view,
the first metal film includes an upper end surface, a first side surface, a second side surface on a side opposite to the first side surface,
the first side surface faces the first color filter and the second side surface faces the second color filter, in a horizontal direction parallel to the first surface,
the upper end surface faces an end portion of the lens in a direction orthogonal to the horizontal direction,
a first distance is a distance between the first side surface of the first metal film and a first side of the first film,
a second distance is a distance between the second side surface of the first metal film and a second side of the first film,
the second side of the first film is opposite to the first side of the first film,
the first distance is different from the second distance,
a refractive index of the first film is less than a refractive index of the first color filter, and
the refractive index of the first film is less than a refractive index of the second film.