US 12,316,276 B2
Oscillator with fin field-effect transistor (FinFET) resonator
Harald Pretl, Schwertberg (AT); Ehrentraud Hager, Linz (AT); and Aly Ismail, Rancho Santa Fe, CA (US)
Assigned to Apple Inc., Cupertino, CA (US)
Filed by Apple Inc., Cupertino, CA (US)
Filed on Dec. 20, 2023, as Appl. No. 18/391,040.
Application 17/713,338 is a division of application No. 17/233,137, filed on Apr. 16, 2021, granted, now 11,323,070, issued on May 3, 2022.
Application 18/391,040 is a continuation of application No. 17/713,338, filed on Apr. 5, 2022, granted, now 11,894,807.
Prior Publication US 2024/0128929 A1, Apr. 18, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H03B 5/32 (2006.01); H03B 5/04 (2006.01); H03B 5/12 (2006.01); H10D 30/62 (2025.01)
CPC H03B 5/326 (2013.01) [H03B 5/04 (2013.01); H03B 5/1253 (2013.01); H03B 5/323 (2013.01); H10D 30/6211 (2025.01); H01L 2924/13067 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An oscillator comprising:
a resonator having:
drive terminals;
sense terminals coupled to the drive terminals; and
fin field-effect transistor (FinFET) circuitry coupled to the drive and sense terminals, the FinFET circuitry having an array of fins characterized by a fin pitch determining a resonant frequency and configured to generate acoustic waves having a frequency that is in a subharmonic frequency range of the resonant frequency.