US 12,316,063 B2
Output light beam formation apparatus
Yuda Wang, San Diego, CA (US); and Rostislav Rokitski, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Appl. No. 17/614,733
Filed by Cymer, LLC, San Diego, CA (US)
PCT Filed May 21, 2020, PCT No. PCT/US2020/034057
§ 371(c)(1), (2) Date Nov. 29, 2021,
PCT Pub. No. WO2020/256885, PCT Pub. Date Dec. 24, 2020.
Claims priority of provisional application 62/863,980, filed on Jun. 20, 2019.
Claims priority of provisional application 62/916,462, filed on Oct. 17, 2019.
Prior Publication US 2022/0224069 A1, Jul. 14, 2022
Int. Cl. H01S 3/22 (2006.01); H01S 3/00 (2006.01); H01S 3/10 (2006.01); H01S 3/101 (2006.01); H01S 3/225 (2006.01); H01S 3/23 (2006.01)
CPC H01S 3/005 (2013.01) [H01S 3/1003 (2013.01); H01S 3/101 (2013.01); H01S 3/225 (2013.01); H01S 3/2207 (2013.01); H01S 3/2333 (2013.01)] 23 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a beam splitter on a beam path, the beam splitter configured to receive light from a deep ultraviolet (DUV) light source; and
a beam rotation device comprising a first plurality of reflective optical elements on the beam path, wherein
the beam splitter is configured to direct a portion of the light received from the DUV light source toward the first plurality of reflective optical elements;
the beam rotation device is configured to reduce a spatial coherence of the light received from the DUV light source by rotating a divergence of the portion of the light to produce rotated light; and
the beam splitter is configured to direct the rotated light and a portion of the light received from the DUV light source onto an output beam path.