US 12,315,747 B2
Workpiece handling architecture for high workpiece throughput
Jason M. Schaller, Austin, TX (US); Michael Carrell, Leander, TX (US); William T. Weaver, Austin, TX (US); and Charles T. Carlson, Cedar Park, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 31, 2022, as Appl. No. 17/977,417.
Prior Publication US 2024/0145270 A1, May 2, 2024
Int. Cl. H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67201 (2013.01) [H01L 21/67718 (2013.01); H01L 21/68707 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A system for transporting workpieces to a platen, comprising:
two load locks;
two robots, each associated with a respective load lock and each having two arms which are capable of independently retracting and extending; and
an orientation station, for aligning each workpiece prior to being placed on the platen, wherein each robot executes a sequence, wherein the sequence comprises:
moving to the respective load lock;
using a first arm of the two arms to place a processed workpiece in the respective load lock and using a second arm of the two arms to remove an unprocessed workpiece;
moving to the orientation station;
using the first arm to remove an aligned workpiece from the orientation station and using the second arm to place the unprocessed workpiece on the orientation station;
moving to the platen; and
using the second arm to remove a processed workpiece from the platen and using the first arm to place the aligned workpiece on the platen.