US 12,314,016 B2
Plasma processing control system with adaptive fuzzy controller
Chad S. Samuels, Fort Collins, CO (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Denver, CO (US)
Filed on Jun. 30, 2022, as Appl. No. 17/855,577.
Prior Publication US 2024/0012370 A1, Jan. 11, 2024
Int. Cl. G05B 13/02 (2006.01)
CPC G05B 13/0275 (2013.01) 20 Claims
OG exemplary drawing
 
1. A plasma processing control system comprising: a user interface configured to receive a reference signal defining target values for a controlled parameter that is provided to a controlled output of a plasma processing system;
at least one sensor to obtain a measure of the controlled parameter that is controlled at the controlled output of the plasma processing system;
an estimation law module configured to produce an estimated model parameter tensor, θ;
a fuzzy controller configured to provide a control signal to adjust at least one actuator, that controls the controlled output of the plasma processing system, based at least upon the reference signal and the measure of the controlled parameter;
a dynamic modification module configured to provide an estimate of the controlled parameter, and while the controlled parameter is being controlled, the dynamic modification module is configured, based at least upon the reference signal, the estimate of the controlled parameter, the measure of the controlled parameter, and the control signal to:
adapt output membership functions of the fuzzy controller;
adapt input membership functions of the fuzzy controller; and
adapt a rule base of the fuzzy controller.