US 12,313,969 B2
Lithographically patterned electrically conductive hydrogels, photo-curable compositions, and elastomers formed from such compositions
Jia Liu, Stanford, CA (US); Yuxin Liu, Stanford, CA (US); and Zhenan Bao, Stanford, CA (US)
Assigned to The Board of Trustees of the Leland Stanford Junior University, Stanford, CA (US)
Filed by The Board of Trustees of the Leland Stanford Junior University, Stanford, CA (US)
Filed on Nov. 22, 2022, as Appl. No. 17/992,837.
Application 17/992,837 is a continuation of application No. 16/758,347, abandoned, previously published as PCT/US2018/057855, filed on Oct. 26, 2018.
Claims priority of provisional application 62/578,264, filed on Oct. 27, 2017.
Prior Publication US 2025/0110401 A1, Apr. 3, 2025
Int. Cl. G03F 7/004 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01)
CPC G03F 7/0046 (2013.01) [G03F 7/20 (2013.01); G03F 7/325 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A manufacturing method for forming a patterned layer, the method comprising:
applying a photo-curable composition to a surface of a substrate;
selectively curing the photo-curable composition; and
developing and removing uncured regions of the photo-curable composition to form the patterned layer on the surface;
wherein:
the photo-curable composition comprises:
a perfluorinated monomer including cross-linkable functional groups; and
a photoinitiator.