US 12,313,879 B2
Semiconductor device, photonic circuit and method for adjusting resonant wavelength of optical modulator
Lan-Chou Cho, Hsinchu (TW); Chewn-Pu Jou, Hsinchu (TW); Cheng-Tse Tang, Hsinchu County (TW); and Stefan Rusu, Sunnyvale, CA (US)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Mar. 7, 2024, as Appl. No. 18/599,189.
Application 18/599,189 is a continuation of application No. 17/674,646, filed on Feb. 17, 2022, granted, now 11,953,720.
Prior Publication US 2024/0248255 A1, Jul. 25, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G02B 6/12 (2006.01); G02F 1/025 (2006.01)
CPC G02B 6/12004 (2013.01) [G02F 1/025 (2013.01); G02B 2006/12142 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A semiconductor device, comprising:
a substrate; and
an optical modulator disposed on the substrate, the optical modulator including:
a first electrical coupling portion having a first type doping;
a second electrical coupling portion having a second type doping; and
an optical coupling portion disposed between the first electrical coupling portion and the second electrical coupling portion, wherein the optical coupling portion includes an intrinsic semiconductor,
wherein the optical modulator is configured to receive a first voltage through the first electrical coupling portion and the second electrical coupling portion to decrease a resonant wavelength of the optical modulator.