| CPC G02B 26/10 (2013.01) [G02B 26/0816 (2013.01)] | 18 Claims |

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1. A scanner, comprising:
a mirror to rotate around a first axis based on a direct drive mechanism;
a substrate separated from the outside of the mirror;
a first and a second mirror support member connected respectively to a first side and a second side of the mirror;
a first and a second mirror spring connected respectively to the first and second mirror support members; and
a plurality of combs formed on the substrate and to supply a rotational force based on electrostatic force to the mirror,
wherein the substrate includes a first edge and a second edge closer to the mirror than the first edge and placed at a lower position than the first edge, the optical interference angle at the second edge is greater than the optical interference angle at the first edge,
wherein magnitude of a rotation angle relative to the second axis intersecting the first axis ranges from 25 degrees to 40 degrees in response to the mirror rotating around the first axis.
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