| CPC G02B 1/002 (2013.01) [G01B 11/254 (2013.01); G02B 1/02 (2013.01); G02B 27/30 (2013.01)] | 18 Claims |

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1. An optoelectronic apparatus, comprising:
an array of emitters configured to emit beams of optical radiation, wherein each of the beams is emitted from the array along a respective first axis;
an optical substrate mounted over the array; and
an optical metasurface disposed on the optical substrate and configured to collimate and split each of the emitted beams into a respective group of collimated sub-beams centered on a respective second axis, and to direct the collimated sub-beams toward a target to form a pattern of spots on the target,
wherein the optical metasurface is configured to implement an optical phase function that includes a tilt component having a tilt coefficient selected to apply a predefined angular tilt to each respective second axis relative to the respective first axis.
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