US 12,313,454 B2
System and method for profiling a laser beam over a galvanometer scan field
Michael J. Scaggs, Clearwater, FL (US)
Assigned to Haas Laser Technologies, Inc., Flanders, NJ (US)
Filed by Haas Laser Technologies, Inc., Flanders, NJ (US)
Filed on Oct. 17, 2022, as Appl. No. 17/967,295.
Prior Publication US 2024/0125645 A1, Apr. 18, 2024
Int. Cl. G01J 1/42 (2006.01); G01J 1/04 (2006.01)
CPC G01J 1/4257 (2013.01) [G01J 1/0411 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system for profiling a focused laser beam of a galvanometer scanner, the system comprising:
an attenuation optic positioned to receive a focused laser beam from a laser beam source of a galvanometer scanner, the attenuation optic comprising;
a first meniscus lens having a first surface having a radius of curvature and a reflective coating positioned to face the focused laser beam source and a second surface opposite the first surface having a radius of curvature and an antireflection coating, wherein the first meniscus lens is tilted at a fixed angle of incidence relative to an optical axis of the focused laser beam;
a second meniscus lens having a first surface having a radius of curvature and a reflective coating positioned to face the second surface of the first meniscus lens and a second surface opposite the first surface having a radius of curvature and an antireflection coating, wherein the second meniscus lens is tilted at substantially the same fixed angle of incidence relative to the optical axis of the focused laser beam as the first meniscus lens and is rotated about 90° relative to the first meniscus lens;
wherein the radius of curvature of the first surface of the first meniscus lens, the radius of curvature of the second surface of the first meniscus lens, the radius of curvature of the first surface of the second meniscus lens and the radius of curvature of the second surface of the second meniscus lens are substantially equal; and
a pixelated detector positioned parallel to a scan field of the galvanometer scanner, the pixelated detector to receive the focused laser beam from the second meniscus lens.