US 12,313,407 B2
Gyro sensor, electronic device, and vehicle
Teruo Takizawa, Matsumoto (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Feb. 27, 2024, as Appl. No. 18/588,401.
Application 18/588,401 is a continuation of application No. 18/321,191, filed on May 22, 2023, granted, now 11,953,324.
Application 18/321,191 is a continuation of application No. 17/504,919, filed on Oct. 19, 2021, granted, now 11,754,396, issued on Sep. 12, 2023.
Application 17/504,919 is a continuation of application No. 16/943,102, filed on Jul. 30, 2020, granted, now 11,187,529, issued on Nov. 30, 2021.
Claims priority of application No. 2019-140790 (JP), filed on Jul. 31, 2019.
Prior Publication US 2024/0200945 A1, Jun. 20, 2024
Int. Cl. G01C 19/5712 (2012.01)
CPC G01C 19/5712 (2013.01) 14 Claims
OG exemplary drawing
 
1. A gyro sensor comprising:
three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
a substrate; and
an element unit that is supported on the upper surface of the substrate located on the plus side of the Z axis and detects an angular velocity based on a change in capacitance, wherein
the element unit comprises:
a mass section configured to be displaced in an X-axis direction along the X-axis parallel to the upper surface of the substrate;
a driving section that drives the mass section in the X-axis direction;
a first fixed section fixed to the upper surface of the substrate;
a second fixed section fixed to the upper surface of the substrate;
a first detecting section that is connected to the mass section and is configured to be displaced in a Z-axis direction along the Z-axis;
a second detecting section that is connected to the mass section and is configured to be displaced in the Z-axis direction;
a first elastic section connecting the first detecting section and the first fixed section;
a second elastic section connecting the second detecting section and the second fixed section;
a first fixed detecting section facing the first detecting section and spaced apart from the first detecting section; and
a second fixed detecting section facing the second detecting section and spaced apart from the second detecting section, wherein
the mass section is arranged between the first detecting section and the second detecting section in a plan view from the Z-axis direction.