US 12,312,127 B2
Process carrier
Lim Joo Chai, Kulim (MY); and Michael C. Zabka, New Prague, MN (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Sep. 20, 2022, as Appl. No. 17/948,923.
Claims priority of provisional application 63/247,038, filed on Sep. 22, 2021.
Prior Publication US 2023/0088106 A1, Mar. 23, 2023
Int. Cl. B65D 85/48 (2006.01); B65D 1/36 (2006.01); B65D 25/10 (2006.01)
CPC B65D 25/107 (2013.01) [B65D 1/36 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A process carrier, comprising:
a carrier body defining an interior space;
a plurality of flanges extending into the interior space of the carrier body, the plurality of flanges defining a plurality of slots;
at least one of the plurality of flanges including a tightener configured to contact a disc or wafer when the disc or wafer is inserted into one of the plurality of slots defined by said at least one of the plurality of flanges;
wherein the tightener contacts the disc at a contact region with a length less than half of an overall length of the tightener,
wherein the tightener projects outwards from said at least one of the plurality of flanges into said one of the plurality of slots,
the tightener including a tapered portion where a cross-sectional thickness of the at least one tightener increases along an insertion direction of the disc or wafer into said one of the plurality of slots.