US 12,311,664 B2
Piezoelectric element, head chip, liquid ejection device, and sensor
Yasuaki Hamada, Chino (JP); Yoshiki Yano, Chino (JP); Kazuya Kitada, Matsumoto (JP); and Koji Ohashi, Matsumoto (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Mar. 30, 2023, as Appl. No. 18/192,795.
Claims priority of application No. 2022-059214 (JP), filed on Mar. 31, 2022.
Prior Publication US 2023/0311504 A1, Oct. 5, 2023
Int. Cl. B41J 2/14 (2006.01); H10N 30/20 (2023.01); H10N 30/853 (2023.01)
CPC B41J 2/14233 (2013.01) [B41J 2/14201 (2013.01); B41J 2002/14258 (2013.01); H10N 30/2047 (2023.02); H10N 30/8542 (2023.02)] 7 Claims
OG exemplary drawing
 
1. A piezoelectric element comprising:
a first electrode;
a piezoelectric layer formed at an upper part of the first electrode; and
a second electrode formed at an upper part of the piezoelectric layer, wherein
the piezoelectric layer contains potassium, sodium, and niobium, and
a Young's modulus of the piezoelectric layer measured by a nanoindentation method exceeds 130 GPa.