US 12,311,577 B2
Method and apparatus for simultaneously slicing a multiplicity of slices from a workpiece
Georg Pietsch, Burghausen (DE)
Assigned to Siltronic AG, Munich (DE)
Appl. No. 18/017,156
Filed by SILTRONIC AG, Munich (DE)
PCT Filed Jul. 7, 2021, PCT No. PCT/EP2021/068883
§ 371(c)(1), (2) Date Jan. 20, 2023,
PCT Pub. No. WO2022/017803, PCT Pub. Date Jan. 27, 2022.
Claims priority of application No. 20186973 (EP), filed on Jul. 21, 2020.
Prior Publication US 2023/0311363 A1, Oct. 5, 2023
Int. Cl. B28D 5/04 (2006.01); B28D 5/00 (2006.01)
CPC B28D 5/045 (2013.01) [B28D 5/0064 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for improving a thickness uniformity of slices obtained by simultaneously slicing a multiplicity of slices from a workpiece having a workpiece axis with a wire saw, comprising:
moving wire of the wire saw relative to the workpiece by rotation of wire guide rollers of the wire saw about their axes, the wire guide rollers having a casing which is provided with wire-guiding grooves, and stretched between the wire guide rollers, a wire web composed of wire sections of the wire;
feeding the workpiece to the wire sections of the wire web in the presence of abrasives, the wire sections sawing completely through the workpiece, wherein
a non-linear pitch function dTAR(WP) is selected in dependence on a target thickness characteristic value function TTAR(WP), a pitch function dINI(WP) and a thickness characteristic value function TINI(WP), the dTAR(WP) function assigning a pitch of adjacent grooves in the casing of the wire guide rollers at a position WP during the slicing operation, TINI(WP) assigning a characteristic value measured on the slices of which are obtained during one or more preceding slicing operations by the wire saw at the position WP, the dINI(WP) assigning a pitch to adjacent grooves in the casing of the wire guide rollers at the position WP during the preceding slicing operations, TTAR(WP) assigning a target thickness characteristic value to slices which are sliced off during the slicing operation at the position WP, wherein WP denotes the axial position of adjacent grooves with respect to the axes of the wire guide rollers.