US 12,311,365 B2
Microfluidic apparatus and manufacturing method thereof
Wei Li, Shanghai (CN); Baiquan Lin, Shanghai (CN); Kerui Xi, Shanghai (CN); Linzhi Wang, Shanghai (CN); and Zhenyu Jia, Shanghai (CN)
Assigned to Shanghai Tianma Micro-Electronics Co., Ltd., Shanghai (CN)
Filed by Shanghai Tianma Micro-Electronics Co., Ltd., Shanghai (CN)
Filed on Jun. 24, 2021, as Appl. No. 17/357,335.
Claims priority of application No. 202110130018.3 (CN), filed on Jan. 29, 2021.
Prior Publication US 2021/0316301 A1, Oct. 14, 2021
Int. Cl. B01L 3/00 (2006.01)
CPC B01L 3/50273 (2013.01) [B01L 3/502707 (2013.01); B01L 2200/12 (2013.01); B01L 2300/0887 (2013.01); B01L 2400/0415 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A microfluidic apparatus, comprising:
a microfluidic substrate, wherein the microfluidic substrate comprises a base substrate, an electrode array layer located on the base substrate, and a hydrophobic layer, and wherein the electrode array layer comprises a plurality of electrodes arranged in an array; and
a microfluidic structure layer, wherein the microfluidic structure layer comprises at least one microfluidic channel;
wherein the microfluidic substrate is configured to apply a voltage to each electrode of the plurality of electrodes according to the at least one microfluidic channel to drive a droplet in each of the at least one microfluidic channel to move,
wherein the microfluidic structure layer is detachably bonded to the hydrophobic layer, the hydrophobic layer is detachably adhered to the electrode array layer, and the microfluidic structure layer and the hydrophobic layer are configured to be able to be completely stripped from the microfluidic substrate, and
wherein at least one side of the microfluidic structure layer is provided with a stripping structure, wherein the stripping structure comprises a raised structure of the microfluidic apparatus or a groove structure of the microfluidic apparatus, the raised structure and the microfluidic structure layer are integrated, or the groove structure is a gap between the microfluidic structure layer and the hydrophobic layer in a direction perpendicular to the microfluidic substrate.