US 12,311,362 B2
System and method for patterning flow cell substrates
Steven Modiano, San Diego, CA (US); Dajun Yuan, San Diego, CA (US); and Randall Smith, San Diego, CA (US)
Assigned to ILLUMINA, INC., San Diego, CA (US)
Appl. No. 17/414,612
Filed by ILLUMINA, INC., San Diego, CA (US)
PCT Filed Aug. 10, 2020, PCT No. PCT/IB2020/057507
§ 371(c)(1), (2) Date Jun. 16, 2021,
PCT Pub. No. WO2021/028815, PCT Pub. Date Feb. 18, 2021.
Claims priority of provisional application 62/884,753, filed on Aug. 9, 2019.
Claims priority of application No. 2023679 (NL), filed on Aug. 21, 2019.
Prior Publication US 2022/0134333 A1, May 5, 2022
Int. Cl. B01L 3/00 (2006.01); C08F 220/56 (2006.01)
CPC B01L 3/502707 (2013.01) [B01L 3/502715 (2013.01); C08F 220/56 (2013.01); B01L 2200/12 (2013.01); B01L 2200/16 (2013.01); B01L 2300/0829 (2013.01); B01L 2300/0893 (2013.01); B01L 2300/0896 (2013.01); B01L 2300/12 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for patterning flow cell substrates, comprising:
preparing a planar waveguide flow cell for a photoinitiated chemical reaction, wherein the flow cell includes:
a substrate;
light coupling gratings on the substrate;
a first layer of material disposed over the substrate and the light coupling gratings;
a patterned second layer of material disposed over the first layer of material, the patterned second layer of material defining nanowells formed in the second layer of material, wherein each nanowell includes a top portion and a bottom portion, and the patterned second layer of material further defines interstitial regions between the nanowells,
wherein preparing the flow cell includes:
silanizing the second layer of material such that both the nanowells and the interstitial regions are silanized;
coating the silanized second layer of material and nanowells with a first group of reactants such that both the nanowells and the interstitial regions are coated with the first group of reactants;
introducing a second group of reactants into the nanowells, wherein the second group of reactants includes at least one target reactant, a copper chelated ligand, and a light-sensitive photoinitiator system; and
directing light internally within the flow cell such that the light coupling gratings and the first layer of material reflect the light to only the bottom portion of each nanowell for photo-initiating a chemical reaction between the first and second groups of reactants, wherein the photo-initiated chemical reaction covalently binds the at least one target reactant to only the bottom portion of each nanowell and the at least one target reactant is not bound to the interstitial regions.