US 11,990,908 B1
Dual-MEMS device with temperature correction of MEMS output based on relative MEMS operation
Aaron Partridge, Cupertino, CA (US); Samira Zaliasl, Jersey City, NJ (US); Meisam Heidarpour Roshan, Sunnyvale, CA (US); and Sassan Tabatabaei, Sunnyvale, CA (US)
Assigned to SiTime Corporation, Santa Clara, CA (US)
Filed by SiTime Corporation, Santa Clara, CA (US)
Filed on Mar. 3, 2020, as Appl. No. 16/807,979.
Application 16/807,979 is a division of application No. 16/292,198, filed on Mar. 4, 2019, granted, now 10,622,973.
Application 16/292,198 is a division of application No. 15/264,583, filed on Sep. 13, 2016, granted, now 10,247,621, issued on Apr. 2, 2019.
Claims priority of provisional application 62/382,735, filed on Sep. 1, 2016.
Claims priority of provisional application 62/289,479, filed on Feb. 1, 2016.
Claims priority of provisional application 62/217,950, filed on Sep. 13, 2015.
Int. Cl. G01K 7/32 (2006.01); H03K 3/03 (2006.01); H03L 1/02 (2006.01); H03L 7/099 (2006.01); H03L 7/18 (2006.01); H03L 7/197 (2006.01)
CPC H03K 3/0315 (2013.01) [G01K 7/32 (2013.01); H03L 1/027 (2013.01); H03L 7/0991 (2013.01); H03L 7/18 (2013.01); H03L 7/1976 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A device comprising:
a first microelectromechanical systems (MEMS) structure having a body that is to move or deflect;
a second MEMS structure having a body that is to move or deflect; and
circuitry to generate temperature correction information dependent on the movement or deflection of each of the body of the first MEMS structure and the body of the second MEMS structure; and
circuitry to process a signal representing measurement of the movement or deflection of the body of the first MEMS structure, in dependence on the temperature correction information, to produce an output;
wherein the device comprises a first die and a second die mounted to the first die, wherein the first die carries the first MEMS structure and the second MEMS structure, wherein the second die carries the circuitry to generate and the circuitry to process, and wherein the device comprises a pin to carry the output.