US 11,990,890 B2
Resonator and resonance device including same
Yoshihisa Inoue, Nagaokakyo (JP); Ryota Kawai, Nagaokakyo (JP); and Yuichi Goto, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Feb. 22, 2021, as Appl. No. 17/181,336.
Application 17/181,336 is a continuation of application No. PCT/JP2019/017254, filed on Apr. 23, 2019.
Claims priority of application No. 2018-171820 (JP), filed on Sep. 13, 2018.
Prior Publication US 2021/0203304 A1, Jul. 1, 2021
Int. Cl. H03H 9/24 (2006.01); H03H 9/02 (2006.01); H03H 9/08 (2006.01); H03H 9/10 (2006.01)
CPC H03H 9/2489 (2013.01) [H03H 9/02259 (2013.01); H03H 9/02448 (2013.01); H03H 9/08 (2013.01); H03H 9/1057 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A resonator comprising:
a base; and
at least three vibrating arms that include an upper electrode and a lower electrode that face each other with a piezoelectric film interposed therebetween, with each of the at least three vibrating arms having fixed ends connected to a front end of the base and open ends be spaced away from the front end,
wherein each of the at least three vibrating arms includes an arm portion that has a constant width and that extends from the fixed end in a direction towards the open end and a mass-adding portion that is connected to a tip of the arm portion and has a width larger than the width of the arm portion, and
wherein an interval between the mass-adding portions is larger than an interval between the arm portions for any two of the at least three vibrating arms that are adjacent to each other and that are constructed to vibrate in opposite phases from each other.