US 11,990,888 B2
Resonator using YX-cut lithium niobate for high power applications
Bryant Garcia, Mississauga (CA)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 11, 2022, as Appl. No. 17/693,264.
Application 17/693,264 is a continuation of application No. 17/022,042, filed on Sep. 15, 2020, granted, now 11,323,090.
Application 17/022,042 is a continuation in part of application No. 16/829,617, filed on Mar. 25, 2020, granted, now 10,868,512, issued on Dec. 15, 2020.
Application 16/829,617 is a continuation in part of application No. 16/782,971, filed on Feb. 5, 2020, granted, now 10,790,802, issued on Sep. 29, 2020.
Application 16/782,971 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/829,617 is a continuation of application No. 16/578,811, filed on Sep. 23, 2019, granted, now 10,637,438, issued on Apr. 28, 2020.
Application 16/782,971 is a continuation in part of application No. 16/438,141, filed on Jun. 11, 2019, granted, now 10,601,392, issued on Mar. 24, 2020.
Application 16/438,141 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/578,811 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 63/026,824, filed on May 19, 2020.
Claims priority of provisional application 62/904,133, filed on Sep. 23, 2019.
Claims priority of provisional application 62/818,564, filed on Mar. 14, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/753,809, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2022/0200567 A1, Jun. 23, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/17 (2006.01); H03H 9/02 (2006.01); H03H 9/54 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/171 (2013.01) [H03H 9/02 (2013.01); H03H 9/54 (2013.01); H03H 9/02015 (2013.01); H03H 9/13 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a substrate;
at least one lithium niobate plate attached to the substrate directly or via one or more intermediate layers, the at least one lithium niobate plate having a portion that forms a diaphragm over a cavity; and
an interdigital transducer (IDT) at a surface of the at least one lithium niobate plate such that interleaved fingers of the IDT are at the diaphragm,
wherein a thickness of at least one of the interleaved fingers of the IDT is greater than or equal to 0.8 times a thickness of the diaphragm and less than or equal to 2.0 times the thickness of the diaphragm.