| CPC H03H 9/1021 (2013.01) [H03H 9/0519 (2013.01); H03H 9/215 (2013.01)] | 10 Claims |
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1. A vibrator device comprising:
a vibrator element including a first quartz crystal substrate including a first surface and a second surface which are in an obverse-reverse relationship, and which extend along an X axis as an electrical axis, a first excitation electrode disposed on the first surface, a second excitation electrode disposed on the second surface so as to be opposed to the first excitation electrode, a first terminal which is disposed on the first surface, and which is electrically coupled to the first excitation electrode, and a second terminal which is disposed on the first surface, and which is electrically coupled to the second excitation electrode;
abase including a substrate located at the first surface side of the vibrator element, a first substrate interconnection provided to the substrate, and a second substrate interconnection provided to the substrate;
a relay substrate including a second quartz crystal substrate which is disposed between the vibrator element and the base, and a thickness direction of which is parallel to a Z axis as an optical axis, a first relay interconnection disposed on a third surface at the vibrator element side of the second quartz crystal substrate, a second relay interconnection disposed on the third surface, a third relay interconnection which is disposed on a fourth surface having an obverse-reverse relationship with the third surface and located on the base side, and which is electrically coupled to the first relay interconnection, and a fourth relay interconnection which is disposed on the fourth surface, and which is electrically coupled to the second relay interconnection;
an element-side bonding member which includes a first bonding member configured to electrically couple the first terminal and the first relay interconnection to each other, and a second bonding member configured to electrically couple the second terminal and the second relay interconnection to each other, and which is configured to bond the vibrator element and the relay substrate to each other; and
a base-side bonding member which includes a third bonding member configured to electrically couple the first substrate interconnection and the third relay interconnection to each other, and a fourth bonding member configured to electrically couple the second substrate interconnection and the fourth relay interconnection to each other, and which is configured to bond the base and the relay substrate to each other, wherein
the first bonding member and the second bonding member are arranged side by side in a direction along the X axis.
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